Program 2018 "Making an impact!" (27.09.2018)
Posters (presented on October 4th from 12:25 after 2 min poster pitches)
P01 | F. Winkler (TU Dresden, DE) TSV Transistor – vertical metal gate FET inside a Through Silicon VIA |
P02 | A. Filbert (Furtwangen University, DE) Additive and Subtractive Fabrication Using Grayscale Lithography |
P03 | S. Killge (TU Dresden, DE) High-aspect-ratio through silicon VIAs (TSVs) for high-frequency application with th-ALD tantalum-based barrier layer, Ruthenium seed layer and subsequent copper electroplating |
P04 | D. Yu (Leibniz Institute for New Materials, DE) Roll-to-roll fabrication of mushroom-shaped micropatterned dry adhesives using flexible templates |
P05 | S. Charania (TU Dresden, DE) 3D optical TSV interconnects for high-frequency application on silicon interposer |
P06 | L. Barbera (ETH Zurich, CH) Three-dimensional printing of hierarchical liquid-crystal-polymer structures |
P07 | R. Kirchner (TU Dresden, DE) Anisotropic wet etching of silicon dioxide using a metal mask and hydrofluoric acid |
October 4th, 2018 (Thursday)
08.00-10.00 | Registration & Networking |
10.00-10.10 | R. Kirchner (TU Dresden, DE) Welcome & Opening |
10.10-11.10 Keynote | M. Wegener (Karlsruhe Institute of Technology, DE) 3D mechanical metamaterials by 3D laser nanoprinting |
Session 1: High resolution 3D patterning (H. Schift)
11.10-11.30 | L. Jonusauskas (Vilnius Laser Center, LT) Hybrid subtractive-additive femtosecond laser manufacturing of functional 3D structures: towards industrial applications |
11.30-11.50 | P.-I. Dietrich (Karlsruhe Institute of Technology, DE and Vanguard Photonics, DE) 3D-nanoprinting for photonic integration and packaging – from lab to fab |
11.50-12.10 | D. Colle (Heidelberg Instruments GmbH, DE) Gray scale lithography: Creating complex 2.5D structures in thick photoresist by direct laser writing |
12:10-12:24 | Poster pitches ("7 in 14") |
12.24-13.30 | Lunch with Posters & Networking |
Session 2: 3D Origami and self-assembly (A. Knoll)
13.30-14.00 Invited | H. Plank (Graz University of Technology, AT) 3D Nanoprinting via Focused Electron Beams |
14.00-14.20 | K. Zimmer (Leibniz-Institut für Oberflächenmodifizierungen e.V., DE) Origami folding of laser-cut polymer foils |
14.20-14.40 | R. Kirchner (TU Dresden, DE) Towards programable polymer-based actuators for origami MEMS actuation |
14.40-15.00 | H. Schift (Paul Scherrer Institute, CH) Self-assembled conductive wires for printed electronics |
15.00-16.00 | Poster & Networking |
Session 3: 3D replication (R. Kirchner)
16.00-16.30 Invited | B. Voisiat (TU Dresden) Direct laser interferrence patterning for roll-to-roll processing |
16.30-16.50 | M. Tormen (Thunder NIL srl and National Research Council CNR, IT) Origination and replication of 3D hierarchical micro and nanostructures by Pulsed-NIL technology |
16.50-17.10 | B. Stender (Multiphoton Optics GmbH, DE)
High Precision 3D Printing – diversity of fabrication modes and applications |
17.10-17.30 | S. Martens (IMS Chips, DE) Challenges of Greyscale Lithographie |
19.00-22.00 | Evening event (Bus leaves from workshop location at 18:00, return on your own from downtown) |
October 5th, 2018 (Friday)
Morning talk
08.30-09.00 Invited | W. Cheng (Monash University, AU) - remote session - |
Session 4: 3D Additive Fabrication and Systems (J. Brugger)
09.00-09.30 Invited | O. Schmidt (Leibniz Institute for Solid State and Materials Research Dresden, DE and Chemnitz University of Technology, DE) 3D microtubular architectures and devices |
09.30-09.50 | P. Karvinen (Finnlitho Ltd and University of Eastern Finland, FI) 3D printing of freeform optics |
09.50-10.10 | M. Henke (TU Dresden) Autonomous Soft Robots |
10.10-10.30 | S. Charania (TU Dresden, DE) Ultra high speed 3D optical interconnects on Silicon Interposer |
10.30-11.30 | Poster & Networking |
Session 5: Thermal Scanning Probe Lithography (O. Schmidt)
11.30-12.00 Invited | J. Brugger (École polytechnique fédérale de Lausanne, CH) Nano-engineering using a heated scanned probe |
12.00-12.20 | Y. K. R. Cho (Instituto de Ciencia de Materiales de Madrid, ES) Oxidation scanning probe lithography in 2D materials |
12.20-12.40 | A. Knoll (IBM Research Zurich, CH) Nanofluidic rocking Brownian motors |
12.40-13.00 | P. Paul (SwissLitho AG, CH) NanoFrazor Lithography for 3D masters at single-nm resolution |
13.00-13.20 | Live Performance with Grand Piano Mr. Dishant Sangani |
13.20-15.00 | Lunch, Networking & Closing |
Past years programes
ad3pa2017 "Discover the potential and the beauty of 3D!"
